Customized Quartz Design & Repair
Quartz Customization for Your Fabrication Needs
Epi & MRC Bell Jars
Epi Bell Jars / Branson Chamber
The semiconductor industry is moving towards higher density
devices, furnace atmosphere contamination becomes an increasingly critical factor in controlling wafer yields. One potential contaminant is sodium, which occurs naturally in the silica
sand used to make fused quartz. If not removed, this highly
mobile ion can effectively destabilize the electrical characteristics of MOS and bipolar devices. GE224 quartz is made in a special process that eliminates up to 90% of naturally-occurring
alkalis. The process achieves a typical sodium level of 0.1 ppm
(vs. a normal level of 0.7 ppm), greatly reduces potassium, and
virtually eliminates lithium. Typically grade GE214 but GE224
quartz is an available option due to the low alkali fused quartz
tubing that is developed for the critical applications of the
semiconductor industry. Similar to grade GE214 with the same
exceptional high viscosity and visual standards, grade GE224 is
manufactured using special methods to reduce alkali content
to the PPB range.
Options
GE224 Material
25mm - 300mm Sizing
MRC Bell Jars
The semiconductor industry is moving towards higher density
devices, furnace atmosphere contamination becomes an increasingly critical factor in controlling wafer yields. One potential contaminant is sodium, which occurs naturally in the silica sand used
to make fused quartz. If not removed, this highly mobile ion can
effectively destabilize the electrical characteristics of MOS and
bipolar devices. GE224 quartz is made in a special process that
eliminates up to 90% of naturally-occurring alkalis. The process
achieves a typical sodium level of 0.1 ppm (vs. a normal level of
0.7 ppm), greatly reduces potassium, and virtually eliminates lithium. Typically grade GE214 but GE224 quartz is an available option
due to the low alkali fused quartz tubing that is developed for
the critical applications of the semiconductor industry. Similar to
grade GE214 with the same exceptional high viscosity and visual
standards, grade GE224 is manufactured using special methods
to reduce alkali content to the PPB range.
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