Vacuum Flanges
for Horizontal Diffusion Furnace Elevators
Vacuum Flanges
Furnace Vacuum Flangers
Vacuum Flangers Designed to Your Needs
G2 offers a full line of vacuum flange assemblies and products for Atmospheric and
LPCVD applications. Whether your process is Poly Silicon, Silicon Nitride, Teos, or Low
Temperature Thermal Anneals, we have flanges to meet your requirements.
Our unique internal water cooling design allows our flanges to sustain process temperatures up to 1000oC while requiring low water flows of 2-15 GPH accordingly. For
low temperature applications, below 400oC, our flanges do not require cooling.
Each vacuum flange incorporates two o-rings and a spacer ring to increase the contact
surface area on the quartz process tube. Using a backing ring to compress, the o-rings
create a solid vacuum seal that ensures leak integrity, as well as reduce stress on the
process tube. Since we compress on the last two inches of the process tube, our design
eliminates flanges rolling off. Also included in each vacuum flange is a bumper o-ring
to reduce quartz chipping on the ends of the tube during installation.
Custom Engraving
Do different injector locations confuse your technicians?
We will engrave your back plate with a specific
process name or furnace name at your request!
Flange Open View From Above
CLOSER LOOK
Our back plates can adapt to almost any vacuum connection: ISO, KF, Ball Sockets, etc.
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We offer a full line of vacuum flange assemblies and products for Atmospheric
and LPCVD applications. Whether your
process is Poly Silicon, Silicon Nitride,
Teos, or Low Temperature Thermal Anneals, we have flanges to meet your
requirements.
These are a perfect addition to your
rear flange - a removable back plate.
You no longer have to compromise
the flange vacuum seal in order to
have access to the rear of your process chamber. Our removable back
plates make maintenance easier for
removing process liners, injectors, and
vacuum components.
Lifetime Worksmanship Warranty - Our Success is Built on TOTAL Customer Satisfaction
Each back plate can be designed,
process specific, to accommodate the
exact Profile TC and internal injector
positions required for process tubes
with and without liners.