WAFER HANDLING AUTOMATION PRODUCT CATALOG | Page 67

All of our Products are Proudly Made in the USA Toll FREE CUSTOMER SUPPORT 1.866.642.2832 Chemical Delivery & Distribution Pump Cabinet Polypropylene cabinet with integrated chemical pump and delivery system This Pump Cabinet is constructed from white polypropylene and measures 48”W x 18”D x 48”H. and features double containment connections, 1/2” double diaphragm pump with surge suppressor, filter chamber, 1kW heat exchanger, exhaust connection with spray shield, clear PVC side access panel and interlocked clear PVC lid. This unit may be configured for stand-alone operation, or interfaced to run from the process tool’s controls. Custom Options: Construction Polypropylene Dimensions 18”D x 48”W x 48”H FM4910-Approved CPVC Pump Dia. Lighted Work Area 1/2” Stainless Steel Powder Coated GAT-PUMP-CAB-184848-PP Quantity Discounts Available - 2 Year Warranty Parts & Labor Drum Dispense Cabinet Polypropylene cabinet with pump system for bulk chemical transfer The Drum Dispense Cabinet is designed to transfer Bulk Chemicals from an onboard 55 gal. drum source to multiple tools via customer supplied signals. The Cabinet is constructed of 1/2” FM 4910 approved, white PVC-C, and measures 35” W x 46” D x 79” H. The Cabinet has a sloped, sump area with drain and a nitrogen purged, control enclosure with tool secured access panels. Updraft exhaust helps maintain a fume controlled enclosure. Drum is monitored for level and presence with capacitive level sensors. A teflon, air-driven, double diaphragm pump is provided for chemical delivery. The storage drum is fed through an Entegris Dispense Head located inside the unit (mating Dip Tube is not included). A manual DI Water Wash down Valve and one DI Water Spray Gun are included. A PLC and programmable Operator Interface Terminal (OIT) allows for display of corresponding alarm conditions: CDA and N2 loss, leak indication for the cabinet, source low levels, and pressure errors. GAT-DRUM-DISP-CAB-354679-PP Quantity Discounts Available - 2 Year Warranty Parts & Labor Chemical Distribution System Programmable chemical dilution and dispensing unit for multiple locations The Chemical Distribution System will automatically measure and dispense accurate amounts of bulk chemicals into process vessels to customer specified locations. The tool is constructed of 1/2” white polypropylene, and measures 48”W x 23.75”D x 70”H and is equipped with four (4) 24” pre-weigh vessels, one for each chemical supplied. Pneumatic level transducers in the preweigh vessels allow continuous level monitoring, while the PLC and programmable operator interface allows for program and recipe changes. This system is capable of transferring programmable amounts of these chemicals to customer specified tools. This system also contains a D.I. water sprayer for easy cleanup, leak sensors for all segregated compartments, and centralized controls and alarms for N2 purge, exhaust failures, and dispense errors. Model Dimensions GAT-CHEM-DIST-CAB-4823.7570-PP 23.75”D x 48”W x 70”H Overall GAT-CHEM-DIST-CAB-4823.7570-PP Customization and Installation available on all G2 Products Quantity Discounts Available - 2 Year Warranty Parts & Labor Product Specifications and Appearances Are Subject To Change Without Notice www.G2AutomatedTechnologies.com 67