WAFER HANDLING AUTOMATION PRODUCT CATALOG | Page 34

Wafer Storage and Transport Stainless Steel and Polypropylene Solutions for your Semiconductor Facility Wafer Storage Single Desiccator Chamber The G2 Desiccator Chamber is designed specifically to facilitate 200mm/300mm wafer boxes and cassettes. Utilizing Static-Dissipative PVC, the chamber features a 304 Stainless Steel frame and outlined door with door latch. This chamber also comes standard with nitrogen controller for users to control and modify chamber humidity levels. Chambers can also be stacked to provide multiple chambers with minimum footprints. *Securely Store and Organize Reticle or Photomask *Ultra-Clean Material Ensures Non Contamination *Optimal Storage Densities for Minimal Footprint Optional Features: Material Options: N2 Plenum 304 Brushed Stainless Steel Stainless Cabinet Stand Electropolished Powder Coated Finish Rolling/Locking Casters Custom Footprint/Design GAT-DES-361626.25-PVC-ESD Quantity Discounts Available - Lifetime Worksmanship Warranty Polypropylene (N2) Purge Cabinets This dry storage cabinet is designed for critical nitrogen purged dry storage in caustic environments. The cabinet is built entirely from white polypropylene for high resistance to numerous corrosive chemicals. Durable high quality hinges and latches provide long service life. Standard features include a Nitrogen inlet connection, a full height plenum for equal gas distribution throughout the cabinet, leveling feet and much more. Some optional features include an adjustable/removable shelving system, magnehelic gauge, flow meter, and more. Material Dimensions White Stress Relieved Polypropylene 52”W x 24”D x 84”H From Floor GAT-DES-CAB-245284-PP Quantity Discounts Available - Lifetime Worksmanship Warranty FOUP Nitrogen Purge Systems Our FOUP Nitrogen Purge Systems meets customer requirements by ensuring a thorough drying of the FOUP and snorkel after wash down via the N2 purge process. The beauty of this system is that is incredibly user friendly. Simply align the FOUP with the built in kinematic coupling pins on the platform and the N2 purge ports will automatically line up with the snorkel and FOUP. Reinforcing jaws lock down the FOUP securely in place on the stand and prevent any leaks in connection. GAT-FOUP-STND-1-SS A quarter turn valve allows for on/off dispensing of Nitrogen through the system lines and high quality Swagelok fittings ensure proper line connections to the gas source. Stainless steel construction means corrosion resistance and compatibility with strict clean room environments. Some of the optional features for our purge systems include an inline heater for the Nitrogen lines as well as custom sizing for use with your specific FOUP size. Quantity Discounts Available - 2 Year Warranty Parts & Labor 34 Lifetime Worksmanship Warranty - Our Success is Built on TOTAL Customer Satisfaction