Microscope Loaders/Unloaders
Custom Automated Microscope Load/Unloaders
Programmable Microscope Load/Unloader with Notch/Flat Finder
AUTOMATIC WAFER LOADER / UNLOADER
GAT-AWM-6800-EX
Customization and Features.
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Customization. Every part of our Microscope loaders can me manipulated to meet your
exact need. Call one of our experienced Design Engineers to plan your next product 1.866.6G2.ATEC or (972)479-0699
2
Versatile Options. The options are the most versatile in the industry. From materials to configuration you choose the right materials for the job.
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High Quality. Fabricated with only the highest quality materials and accessories, our products are sure to last your business a lifetime.
Quantity Discounts Available - Lifetime Worksmanship Warranty
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Lifetime Worksmanship Warranty - Our Success is Built on TOTAL Customer Satisfaction
The Automatic Programmable Wafer Microscope Loader (AWM-6800-EX) system extracts a
wafer from a predefined location of a 25-wafer
cassette and places the wafer on a self-centering
chuck for flat/notch alignment. An exchange
arm then places the wafer onto a stage under
a microscope for inspection, and returns the
wafer to the original location upon completion.
This operation can be done by using any one of
the selected modes of operation outlined in this
manual. This machine is designed to contact
wafers only on the back side of the wafer with
vacuum to secure the wafer movement.
MACRO & MICRO INSPECTION
The inspection is a three-step operation: Macro
& Micro inspection, the arm picks up the wafer
& retracts it to “out” home position. Operator
can visually inspect the wafer & decide to pass
or reject the wafer (Macro Mode). If the wafer
is rejected (by clicking the reject button on the
screen), then the wafer will be sent back to the
cassette. User may also request for flat/notch
alignment either in the 3, 6, 9, or 12 o’clock
position before transition to microscope. After
inspection, the wafer tray arm automatically returns the wafer to it’s original slot.
OPERATION MODES
The AWM-6800-EX comes with 5 usable modes
for specific operations. “Inspect All”, “Manual”,
“Random”, “Series”, and “Interval” The standard
“Inspect All” will identify and inspect every wafer. “Manual” mode the user must select the wafer to be inspected. In “Random” mode the user
chooses the amount of wafers to be inspected
while the system randomly selects those wafers
to be inspected until the number chosen is met.
“Series” mode, the user will choose the specific
wafers to be selected and the group of selected
wafers will be inspected. Finally in the “Interval”
mode the user selects an interval for the wafers
to be inpsected along with the starting location. For example, every 2nd or every 3rd wafer
starting with X.