Book of Abstracts: July 2013 Paliwanagan sa UP Diliman July 2013 | Page 27

About the Inventors
Dr. Caesar A. Saloma is a Professor of Physics at UP Diliman. His research areas
of interest are in the fields of optics, photonics and signal processing. His works
have earned him commendation from international scientific organizations such
as the ASEAN Committee on Science and Technology, and the International
Commission on Optics. In 2011, Dr. Saloma was named by Asian Scientist Magazine
as one of the 15 Asian scientists to watch out for. Dr. Saloma has received
numerous awards for his work as a researcher and teacher, including the “Gawad
Chanselor para sa Natatanging Guro” award in 2006 and several “Gawad
Chanselor para sa Pinakamahusay na Mananaliksik” awards from UP Diliman. He
was also appointed to the highest rank of Scientist III by the UP System in 2006.
Currently, Dr. Saloma serves as the Chancellor of UP Diliman.
Dr.Jonathan A. Palero obtained his BS Physics (2000) and MS Physics (2002)
degrees from UP Diliman. Under the supervision of Dr. Wilson Garcia and Dr.
Caesar Saloma, he developed a multi-color laser source based on hydrogen
Raman shifting, for which he was awarded the prestigious Gawad Chanselor
para sa Natatanging Imbensiyon at Inobasyon in 2002. Dr. Palero pursued his PhD
degree in Biophysics at Utrecht University,The Netherlands. His PhD thesis
“Nonlinear Spectral Imaging of Biological Tissues,” was awarded the Best Thesis
Prize in 2007. In 2011, after working as a Postdoc fellow at The Institute of
Photonic Sciences (ICFO), Barcelona, Spain, he joined Philips Research in
Eindhoven, The Netherlands as a Research Scientist. At present his team at the
Care and Health Applications leads the innovation in the field of skin diagnostics
and treatment.
Dr. Wilson O. Garcia is an Associate Professor at the National Institute of Physics,
UP Diliman. He is also the current Deputy Director for Research and Extension at
the NIP. His fields of specialization are lasers, optics, and spectroscopy.
Dr. Garcia finished all his degrees in the Department of Physics/National Institute
of Physics in UP Diliman. He also became a research fellow and visiting scientist
at the University of Swansea, UK; Institute of Quantum Electronics in Florence,
Italy; Institute of Laser Technology in Shanghai, China; and Institute of Laser
Engineering in Osaka University, Japan. Dr. Garcia is also a recipient of several
honors, awards and recognitions. Among these are the: National Research Council
of the Philippines Achievement Award, 2007; Dr. Jose P. Rizal Awards for
Excellence in Science and Technology, 2004; and Gawad Chanselor para sa
Natatanging Imbensiyon at Inobasyon, UP Diliman, 2002.

50 Paliwanagan sa UP Diliman

TITANIUM NITRIDE THIN FILM FORMATION ON METAL
SUBSTRATE BY CHEMICAL VAPOR DEPOSITION
IN A MAGNETIZED SHEET PLASMA SOURCE
(COATIN™: TIN COATING TECHNOLOGY)
Henry J. Ramos
The invention relates to a titanium nitride film chemical vapor deposition process
on metal substrate using a magnetized sheet plasma source. Interest in new
coatings and surface treatment methods has been on the upsurge during the last
decade of the 1990s, especially for titanium nitride (TiN). A TiN film is a remarkably
hard and wear-resistant coating on tools since it decreases the rate of abrasive
wear during the cutting process as well as the chemical interaction between the
tool and the work piece because of its chemical inertness. Several techniques
such as chemical vapor deposition, physical vapor deposition, ion plating, ion
beam-assisted deposition, sputtering, and hybrid processes have been used to
prepare TiN films. The films produced by these techniques, however, often exhibit
poor adhesion to the substrate, require high deposition temperature, need a relatively
long duration of time for thin film formation, and cover a limited substrate surface.
The present invention surmounts these problems through the discovery of a
deposition process where: a) there is no heating mechanism introduced, b) the
synthesis of the film is relatively short, and c) the synthesis can be done over a
wide area of substrate surface, without sacrificing the quality of the film. Although
the invention demonstrates the capaci ty of synthesizing titanium nitride for smallsized samples, the wide area plasma could very well serve the coating of larger
samples. (Source: CoaTiN® Patent Document)
This invention was granted patents in the Philippines (Patent No. 1-2004-502138
issued on 5 November 2009), the United States (Patent No. 7,438,955 issued on
21 October 2008), Japan (Patent No. 4481657 issued on 26 March 2010), Europe
(Patent No. 1485516 issued on 24 August 2011), and Malaysia (Patent No. MY148608-A issued on 15 May 2013).
About the Inventor
Dr. Henry J. Ramos is a Professor of Physics at UP Diliman National Institute of
Physics and holds the rank of UP Scientist since 2007. His expertise is in
experimental plasma physics and its applications to the production of high-grade
thin films of oxides, nitrides, and carbides plasma sterilization, and ion irradiation
of polymers. He established the only Plasma Physics Laboratory in the Philippines
and spearheaded the development of seven devices to study ion sources, plasmas,
and their applications.

Paliwanagan sa UP Diliman 51