Book of Abstracts: July 2013 Paliwanagan sa UP Diliman July 2013 | Page 26

METHOD FOR GENERATING HIGH-CONTRAST IMAGES
OF SEMICONDUCTOR SITES VIA ONE-PHOTON OPTICAL
BEAM-INDUCED CURRENT IMAGING AND CONFOCAL
REFLECTANCE MICROSCOPY (1P-OBIC MICROSCOPIC
IMAGING FOR SEMICONDUCTOR SITES)
Caesar A. Saloma, Jelda Jayne C. Miranda
& Vincent Ricardo M. Daria
This invention relates to a method of precisely determining the location of defects
in an integrated circuit (IC). The invention, in one broad sense, is about the discovery
that exclusive high-contrast images of semiconductor sites can be generated
quickly and accurately from the 1P-OBIC image and the confocal reflectance
image which are obtained via one and the same excitation beam that is focused
on the IC sample. The process makes use of the fact that: (1) confocal images are
optically-sectioned images while 1P-OBIC images are exclusive low-contrast
images of semiconductor sites, and (2) both the confocal image and 1P-OBIC
image are produced with an optical beam. (Source: 1P-OBIC Patent Document)
Because the method can produce two images in a single scan, there is no need
for separate imaging instruments, thus making 1P-OBIC microscopic imaging
significantly less expensive than commercial failure detection facility.
This invention was granted patents in the Philippines (Patent No. 1-2005-500056
issued on 23 November 2007) and the United States (Patent No. 7,235,988 issued
on 26 June 2007).
About the Inventors
Dr. Caesar A. Saloma is a Professor of Physics at UP Diliman. His research areas
of interest are in the fields of optics, photonics and signal processing. His works
have earned him commendation from international scientific organizations suchas
the ASEAN Committee on Science and Technology, and the International Commission
on Optics. In 2011, Dr. Saloma was named by Asian Scientist Magazine as one of
the 15 Asian scientists to watch out for. Dr. Saloma has received numerous
awards for his work as a researcher and teacher, including the “Gawad Chanselor
para sa Natatanging Guro” award in 2006 and several “Gawad Chanselor para
sa Pinakamahusay na Mananaliksik” awards from UP Diliman. He was also
appointed to the highest rank of Scientist III by the UP System in 2006. Currently,
Dr. Saloma serves as the Chancellor of UP Diliman.

48 Paliwanagan sa UP Diliman

Dr. Jelda Jayne C. Miranda is a former Research Associate at the Plasma Physics
Laboratory of the National Institute of Physics, UP Diliman. Due to her groundbreaking
work in optics and electronics, she caught the interest of Intel Philippines where
she currently works as a researcher.
Dr. Vincent Ricardo M. Daria is a former Associate Professor at the UP Diliman
National Institute of Physics and a former scientist at the Risoe National Laboratory
in Roskilde, Denmark. His research expertise and interests are in neurophotonics,
wavefront engineering, and optical and multiple beam optical tweezers. Dr. Daria
earned his PhD in Applied Physics from Osaka University and is presently a
research fellow at the Australian National University. He is also affiliated with the
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