Step 2:
Encoder? Which type?
external positi
on
sensing availa
ble
(i.e. optics)?
no sensor needed
open loop
need to get to a
former position?
need to know
the relative
displacement?
need to know
the position?
/NUM(+)
Step 3:
Which environmental option?
am
n
bi e
t
/RT
> 10 -8 mBar
pressure?
> 5
x 1 0 -1
1
bak
m
eab Bar
le
/UHV
/HV
attoMOTION
Piezo-based Nano Drives