ECSx3070
ECSx3080
ECSx5050
ECSxy5050
ECSz3030
/RT, /HV, /UHV /RT
/NUM, /NUM+ /NUM
ECSz5050
/HL /HL /HL --- --- ---
30 x 70; 9.5 mm 30 x 80; 9.5 mm 50 x 50; 9.5 mm 50 x 50; 16.4 mm 31x30; 31.5mm 50 x 50; 32 mm
40mm 50 mm 30 mm 25 x 25 mm² 5 mm 8 mm
4.5 mm/s 4.5 mm/s 4.5 mm/s 4.5 mm/s 2 mm/s 2 mm/s
210 N 240 N 150 N 150 N 8 N 8 N
1 N (5 N optionally) 1 N (5 N optionally) 1 N (5 N optionally) 2 N 8 N 8 N
1 nm 1 nm 1 nm 1 nm 1 nm 1 nm
50 nm 50 nm 50 nm 50 nm 50 nm 100 nm
attoMOTION
Piezo-based Nano Drives