attoPUBLICATIONS - Page 15

ds M12/C7.6 D4/F13 M12/C1.6 M15.5/C1.6/FLEX focussing collimating collimating collimating Ø 4 mm, length 11.5 mm Ø 14 mm, length 17.4 mm Ø 22 mm, length 20.6 mm Ø 14 mm, length 49.2 mm clamped metric M12 x 0.5 metric M15.5 x 0.5 metric M12 x 0.5 70 µm @ 13 mm 1.6 mm 1.6 mm 7.6 mm 13 mm infinity infinity infinity none (fiber glued) FC/PC FC/PC FC/PC /RT, /LT/HV, /UHV, /RAD /RT, /LT/HV, /UHV, /RAD /RT, /LT/HV, /UHV, /RAD /RT, /LT/HV, /UHV, /RAD glass, silicon wafer, mirror glass and mirror glass and mirror retroreflector in-situ process monitoring of tools run-out control, detection of imbalances monitoring/error diagnostics of machine components calibration and synchronization of large scale machines 11..15 mm bis zu 5000 mm bis zu u5000 mm - ± 0.35° ± 0.03° ± 0.03° - 30..45 mm 100 mm 100 mm - ± 0.35° ± 0.5° @ 50 mm ± 1° @ 30 mm - - bis zu 5000 mm bis zu 5000 mm bis zu 5000 mm - ± 2° ± 2° ± 20 ° - - - ± 2 mm Customized Sensor Heads Sensor heads can be customized to specific applications in the length of the connecting fibers, the environmental compatibility, or the lens geometry.