Machine-Integrated Sensors for Motion Capturing
Sensorics Solutions
OEM Interferometers optimized for machine integration Customers can choose:
The growing demand for high accuracy position sensing in machine
tools requests cost efficient yet flexible sensors with high resolution at
potentially large working ranges. Up to today, interferometry has been
well known for highest accuracy but also high costs and demanding
space requirements, making it unattractive for mass application and
machine integration. • a wide range of interfaces (analog sin/cos, digital incremental, field busses)
• various sensor head designs for environments ranging from low
temperature to 400°C. Sensor head diameter from 1.2 mm up to 15.5 mm
• distance sensor head to target from 0 mm to > 5 meters
• target velocity up to 2 m/s
• direct beam or mirror deflection
• customized housing
attocube’s IDS3010 now solves this challenge: the ultra compact OEM
interferometer is an economic solution and optimized for machine inte-
gration with an unrivaled optical performance. Especially for applica-
tions exceeding the specifications of industry-wide used glass-scales,
the IDS3010 is capable of capturing motions more accurate than other
measurement systems.
TYPICAL APPLICATIONS
• Position sensing/control of stages in machine tool building or
semiconductor industry
• Increasing accuracy of conventional glass-scales, e.g. for testing
devices used in semiconductor inspection/backend markets
attoSENSORICS
Ultra Precision Sensors