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Step 2: Encoder? Which type? external positi on sensing availa ble (i.e. optics)? no sensor needed open loop need to get to a former position? need to know the relative displacement? 0 °-1 temperature range need to know the position? /NUM 00 ° C < 0°C /RES < 1 K Step 3: Which environmental option? /RT -4 > 10 ar mB pressure? re (for low temperatu n) before cooldow > 5 x 1 0 -1 1 bak m eab Bar le /ULT T < 0°C ? /LT /HV T < 0 °C ? > 10 -8 mBar /UHV /LT/HV T < 0°C ? /LT/UHV attoMOTION Piezo-based Nano Drives