Step 2:
Encoder? Which type?
external positi
on
sensing availa
ble
(i.e. optics)?
no sensor needed
open loop
need to get to a
former position?
need to know
the relative
displacement?
0 °-1
temperature range
need to know
the position?
/NUM
00 ° C
< 0°C
/RES
< 1 K
Step 3:
Which environmental option?
/RT
-4
>
10
ar
mB
pressure?
re
(for low temperatu
n)
before cooldow
> 5
x 1 0 -1
1
bak
m
eab Bar
le
/ULT
T < 0°C ?
/LT
/HV
T < 0 °C ?
> 10 -8 mBar
/UHV
/LT/HV
T < 0°C ?
/LT/UHV
attoMOTION
Piezo-based Nano Drives