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ANSz100/hs ANSz100/std ANSz100/lr /RT, /HV, /UHV, ANSxyz100/hs /LT, /LT/HV, ANSxyz100/std ANSx150 /LT/UHV      24 x 24; 10 mm 24 x 24; 10 mm 24 x 24; 10 mm 24 x 24; 10 mm 24 x 24; 10 mm 24 x 24; 9 mm 4.3 µm 24 µm 50 µm 40 x 40 x 4.3 µm³ 50 x 50 x 24 µm³ 80 µm 2 µm 15 µm 30 µm 9 x 9 x 2 µm³ 30 x 30 x 15 µm³ 125 µm 1 N 1 N 1 N 1 N 1 N 1 N ANSxyz50 attoMOTION Piezo-based Nano Drives