Retrieve nano-features over millimeter ranges!
closed loop scanning & global sample coordinates
Science and technology delve deeper and deeper into the nanoworld. In
particular, scanning probe & confocal microscopy have been concerned with
features on the nanoscale ever since its invention. Reliably scanning over
tens of micrometers range down to a few hundred nm is comparatively easily
achieved by using piezo based scanners.
However, using piezo-based scanners usually relies on the assumption that
the relation between applied voltage and displacement is linear. In reality,
most scanners show large non-linear behaviour and hysteresis, especially
for large scan ranges. Creep, i.e. drift in position after approaching a certain
location, is a further phenomenon which is common to all piezo scanners.
In many experiments, reproducibly locating a small feature on a surface
is crucial, and sometimes hysteresis and non-linearity in the acquired
image are not acceptable. Sometimes, SPM images need to be evaluated for
particularly and for the specific mutual distances of certain features, and
hence, any distortions due to those nonlinearities may impede such analyses
significantly.
total available range
up to5 mm
Much more often, however, finding a certain region of interest