hexaCUBE
integrated 6D motion solution
Linear Repeatability: Travel Range 1 mm
Technology
travel mechanism
hexaCUBE 190
six ECS5050/HL linear piezo positioners
Size and Dimensions
footprint; height 190 mm x 180 mm; 105 mm
max installation space 220 mm x 210 mm; 125 mm
aperture
weight
load
Travel Range
linear x
linear y
linear z
rotational Θx
rotational Θy
rotational Θz
26 mm (1 inch)
1.95 kg
0.7 kg
± 15 mm
± 15 mm
± 20,0 mm
+ 33 / - 19°
± 21°
± 19°
Repeatability (1 sigma)
x,y, z
Θx, Θy, Θz
Physical Properties
materials
stiffness
Working Conditions
temperature
50 nm
1 µrad
aluminum, stainless steel, plastic
1 N/µm (x,y), 3 N/µm (z)
0..100°C
Compatibility with Electronics
two ECC100/PRO required
attoMOTION
Piezo-based Nano Drives
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