attoPUBLICATIONS attoCATALOG-2017/18 | Page 358

ECR5050 hs - ECR5050/NUM hs | open loop & closed loop
nanoprecise stepper rotator
°C
DEVELOPMENT
1E-9 mbar
360° endless
2 kg
0 .. 100 °C
PRODUCTS
€
SOFT/HARDWARE
€
MIO. €
R&D ENGINEER
REVENUE
MIC
available in our webshop
shop.attocube.com
DEVELOPMENT
attoshop
€
MIO. €
Size and Dimensions
SOFT/HARDWARE
€
R&D ENGINEER
REVENUE
Coarse Positioning Mode
footprint; height 50 x 50; 15 mm travel range (step mode) 360 ° endless
weight (aluminum/stainless steel) 102/214 g typical minimum step size 0.2 m°
max. drive velocity (@ 300 K, no load) 15 °/s
Materials
positioner body aluminum / stainless steel Fine Positioning Mode actuator PZT ceramics fine positioning range (@ 300K) 0 .. 15 m°
bearings stainless steel fine positioning resolution μ°
connecting wires insulated twisted pair, copper Accuracy of Movement (open loop)
Options
repeatability of step sizes typically 5 % over full range
environmental options /RT, /HV, /UHV forward / backward step asymmetry typically 5-10 %
material option /Al, /StSt wobble ±6 mrad
encoder options /NUM Accuracy of Positioning (closed loop)
Compatibility with Electronics
open / closed loop controller
ECC100
position resolution 0.01 m°
repeatability 1 m°
Load @ Ambient Conditions (mounting orientation: vertical)
maximum vertical load 20 N (2 kg)
maximum dynamic torque 5 Ncm
PAGE 356