attoPUBLICATIONS attoCATALOG-2017/18 | Page 356

ECR3030 - ECR3030/NUM | open loop & closed loop
nanoprecise stepper rotator
°C
DEVELOPMENT
5E-11 mbar
360° endless
2 kg
PRODUCTS
€
0 °.. 100 °C
SOFT/HARDWARE
€
MIO. €
R&D ENGINEER
REVENUE
MIC
available in our webshop
shop.attocube.com
DEVELOPMENT
attoshop
€
MIO. €
Size and Dimensions
SOFT/HARDWARE
€
R&D ENGINEER
REVENUE
Coarse Positioning Mode
footprint; height 30 x 30; 13.5 mm travel range (step mode) 360 ° endless
weight (aluminum/stainless steel) 28/66 g typical minimum step size 0.4 m°
max. drive velocity (@ 300 K, no load) 10 °/s
Materials
positioner body aluminum / stainless steel Fine Positioning Mode actuator PZT ceramics fine positioning range 0 .. 10 m°
bearings stainless steel fine positioning resolution μ°
connecting wires insulated twisted pair, copper Accuracy of Movement (open loop)
Options
repeatability of step sizes typically 5 % over full range
environmental options /RT, /HV, /UHV forward / backward step asymmetry typically 5-10 %
material option /Al, /StSt wobble ±6 mrad
encoder options /NUM Accuracy of Positioning (closed loop)
Compatibility with Electronics
open / closed loop controller
ECC100
position resolution 0.01 m°
repeatability 1 m°
Load @ Ambient Conditions (mounting orientation: axis vertical)
maximum vertical load 20 N (2 kg)
maximum dynamic torque 2 Ncm
PAGE 354