attoPUBLICATIONS attoCATALOG-2017/18 | Page 355

ECGp5050 - ECGp5050/NUM | open loop & closed loop DEVELOPMENT € nanoprecise stepper goniometer PRODUCTS SOFT/HARDWARE € MIO. € R&D ENGINEER REVENUE MIC available in our webshop °C shop.attocube.com DEVELOPMENT 10° 10 -9  mbar 1 kg attoshop SOFT/HARDWARE 0 .. 100 °C € MIO. € € R&D ENGINEER REVENUE Lower goniometer of a tip-tilt stage; for more information on combining goniometers please refer to page 261 Size and Dimensions Coarse Positioning Mode footprint; height 50 x 50; 17 mm travel range (step mode) 10° max installation space 50 x 69.8; 19.5 mm typical minimum step size 0.1 m° distance of center of rotation to top 77 mm max. drive velocity (@ 300 K, no load) 3 °/s weight (aluminum/stainless steel) 137 / 247 g Fine Positioning Mode Materials fine positioning range 0 .. 1.1 m° positioner body aluminum / stainless steel fine positioning resolution μ° actuator PZT ceramics Accuracy of Movement (open loop) bearings stainless steel repeatability of step sizes typically 5 % over full range connecting wires insulated twisted pair, copper forward / backward step asymmetry typically 5-10 % Options Accuracy of Positioning (closed loop) environmental options /RT, /HV, /UHV position resolution 1 μ° material option /Al, /StSt repeatability 50 μ° encoder options /NUM Load @ Ambient Conditions (mounting orientation: axis horizontal) high load option /HL/RT maximum vertical load 10 N (1 kg) maximum dynamic torque 8.7 Ncm (/HL: 43.5 Ncm) Compatibility with Electronics open / closed loop controller ECC100 attoMOTION Piezo-based Nano Drives PAGE 353