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ECSz3030 - ECSz3030/NUM | open loop & closed loop
nanoprecise stepper goniometer
°C
DEVELOPMENT
5 mm
800 g
PRODUCTS
€
0 .. 100 °C
SOFT/HARDWARE
€
MIO. €
R&D ENGINEER
REVENUE
MIC
available in our webshop
shop.attocube.com
DEVELOPMENT
attoshop
€
MIO. €
Size and Dimensions
SOFT/HARDWARE
€
REVENUE
R&D ENGINEER
Coarse Positioning Mode
footprint; height 31 x 30; 31,5 mm travel range (step mode) 5 mm
max installation space 36,1 x 30; 36,5 mm max. drive velocity (@ 300 K) 2 mm/s
weight (aluminum version) 90 g Fine Positioning Mode
Materials
fine positioning range 0 .. 0.8 μm
positioner body aluminum fine positioning resolution sub-nm
actuator PZT ceramics Accuracy of Movement (open loop) bearings stainless steel repeatability of step sizes typically 5 % over full range
connecting wires copper, jacket: RT: Teflon/PTFE forward / backward step asymmetry typically 10 %
Options
Accuracy of Positioning (closed loop)
environmental options /RT position resolution
1 nm
material ptions /Al repeatability
50 nm
encoder options /NUM Load @ Ambient Conditions (mounting orientation: axis horizontal)
Compatibility with Electronics
open / closed loop controller
ECC100
maximum vertical load 8 N
maximum dynamic force along the axis 8 N