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Linear Positioners
PAGE 348

ECSx5050 - ECSx5050 / NUM | open loop & closed loop nanoprecise stepper positioner for linear , horizontal motion

Linear Positioners
° C
5E-11 mbar 30 mm 15 kg
0 .. 100 ° C
€
€
MIC attoshop available in our webshop shop . attocube . com
Size and Dimensions footprint ; height max installation space weight ( aluminum / stainless steel ) Materials positioner body actuator bearings connecting wires Options environmental options material option encoder options high load option Compatibility with Electronics open / closed loop controller
50 x 50 ; 9.5 mm 50 x 81.6 ; 9.5 mm 70 / 149 g
aluminum / stainless steel PZT ceramics stainless steel insulated twisted pair , copper
/ RT , / HV , / UHV / Al , / StSt / NUM / HL / RT
ECC100
Coarse Positioning Mode
travel range ( step mode )
30 mm
typical minimum step size
50 nm
max . drive velocity (@ 300 K , no load )
4.5 mm / s
Fine Positioning Mode
fine positioning range
0 .. 1.6 μm
fine positioning resolution
sub-nm
Accuracy of Movement ( open loop )
repeatability of step sizes
typically 5 % over full range
forward / backward step asymmetry
typically 5-10 %
Accuracy of Positioning ( closed loop )
position resolution
1 nm
repeatability
50 nm
Load @ Ambient Conditions ( mounting orientation : axis horizontal )
maximum vertical load
150 N ( 15 kg )
maximum dynamic force along the axis
1 N (/ HL : 5N )