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ANSxyz100
open loop xyz-scanner, available with various scan ranges
10 mK .. 373 K
0 .. 31 T
5E-11 mbar
Size and Dimensions
100 g
up to 50 x 50 x
24 µm 3
Fine Positioning Mode
footprint; height 24 x 24; 10 mm
weight 19 g
Materials (non-magnetic)
standard option
fine positioning
range
50 x 50 x 24 µm 3 @ 300 K
30 x 30 x 15 µm 3 @ 4 K
high stability option 40 x 40 x 4.3 µm 3 @ 300 K
9 x 9 x 2 µm 3 @ 4 K
positioner body titanium actuator PZT ceramics fine positioning resolution
driving shaft ceramics Accuracy of Movement
connecting wires insulated twisted pair, copper
sub-nm resolution
repeatability typically 0.1%
Options creep typically 0.5 .. 0.8% per decade of time
environmental options /RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV linearity typically 5 .. 10% *
material option /CuBe Load @ Ambient Conditions (mounting orientation: axis horizontal)
Compatibility with Electronics
open loop controller ANC300: ANM200, ANM300
closed loop controller ANC350/FPS
maximum vertical load 1 N (100 g)
maximum torque on the axis 20 Ncm
* measured by maximum deviation from linear fit on full range