attoPUBLICATIONS attoCATALOG-2017/18 | Page 329

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ANSz100 open loop z-scanner – three different scan ranges available

Scanners
10 mK .. 373 K 0 .. 31 T 5E-11 mbar up to 50 µ m 2 100 g Size and Dimensions footprint ; height weight Materials ( non-magnetic ) positioner body actuator driving shaft connecting wires Options environmental options material option Compatibility with Electronics open loop controller closed loop controller
24 x 24 ; 10 mm 19 g
titanium PZT ceramics ceramics insulated twisted pair , copper
/ RT , / HV , / UHV , / LT , / LT / HV , / LT / UHV / CuBe
ANC300 : ANM200 , ANM300 ANC350 / FPS
Fine Positioning Mode standard range fine positioning range large range
high stability
24 µ m @ 300 K 15 µ m @ 4 K
50 µ m @ 300 K 30 µ m @ 4 K
4.3 µ m @ 300 K 2 µ m @ 4 K
sub-nm resolution
fine positioning resolution
Accuracy of Movement
repeatability
typically 0.1 %
creep
typically 0.5 .. 0.8 % per decade of time
linearity
typically 5 .. 10 % *
Load @ Ambient Conditions ( mounting orientation : axis horizontal )
maximum vertical load
1 N ( 100 g )
maximum torque on the axis
20 Ncm
* measured by maximum deviation from linear fit on full range
attoMOTION
Piezo-based Nano Drives