attoPUBLICATIONS attoCATALOG-2017/18 | Page 328

PAGE 326 ANSxy100 open loop xy-scanner – two different scan ranges available 10 mK .. 373 K 0 .. 31 T 5E-11 mbar Size and Dimensions footprint; height weight up to 50 x 50 µm² 100 g Fine Positioning Mode 24 x 24; 10 mm 18 g Materials (non-magnetic) positioner body titanium actuator PZT ceramics drivin shaft ceramics connecting wires insulated twisted pair, copper Options environmental options /RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV material option /CuBe Compatibility with Electronics open loop controller ANC300: ANM200, ANM300 closed loop controller ANC350/FPS fine positioning range standard range 40 x 40 µm 2 @ 300 K 9 x 9 µm 2 @ 4 K large range 50 x 50 µm 2 @ 300 K 30 x 30 µm 2 @ 4 K fine positioning resolution sub-nm Accuracy of Movement repeatability typically 0.1% creep typically 0.5 .. 0.8% per decade of time linearity typically 5 .. 10% * Load @ Ambient Conditions (mounting orientation: axis horizontal) maximum vertical load 1 N (100 g) maximum torque on the axis 20 Ncm * measured by maximum deviation from linear fit on full range