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ANSxy100
open loop xy-scanner – two different scan ranges available
10 mK .. 373 K
0 .. 31 T
5E-11 mbar
Size and Dimensions
footprint; height
weight
up to 50 x 50 µm²
100 g
Fine Positioning Mode
24 x 24; 10 mm
18 g
Materials (non-magnetic)
positioner body titanium
actuator PZT ceramics
drivin shaft ceramics
connecting wires insulated twisted pair, copper
Options
environmental options /RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV
material option /CuBe
Compatibility with Electronics
open loop controller ANC300: ANM200, ANM300
closed loop controller ANC350/FPS
fine positioning
range
standard range 40 x 40 µm 2 @ 300 K
9 x 9 µm 2 @ 4 K
large range 50 x 50 µm 2 @ 300 K
30 x 30 µm 2 @ 4 K
fine positioning resolution
sub-nm
Accuracy of Movement
repeatability typically 0.1%
creep typically 0.5 .. 0.8% per decade of time
linearity typically 5 .. 10% *
Load @ Ambient Conditions (mounting orientation: axis horizontal)
maximum vertical load 1 N (100 g)
maximum torque on the axis 20 Ncm
* measured by maximum deviation from linear fit on full range