attoPUBLICATIONS attoCATALOG-2017/18 | Page 326

PAGE 324 ANSxyz50 compact open loop xyz-scanner 10 mK .. 373 K 0 .. 31 T 5E-11 mbar Size and Dimensions 30 x 30 x 4.3 µm 3 50 g Fine Positioning Mode footprint; height 15 x 15; 13 mm weight 11,5 g Materials (non-magnetic) fine positioning range 30 x 30 x 4.3 µm 3 @ 300 K 15 x 15 x 2 µm 3 @ 4 K fine positioning resolution sub-nm positioner body titanium Accuracy of Movement (open loop) actuator PZT ceramics scan repeatability typically 0.1 % connecting wires insulated twisted pair, copper creep typically 0.5 - 0.8 % per decade of time linearity typically 5 - 10 % Options environmental options /RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV Load @ Ambient Conditions (mounting orientation: axis horizontal) material option /CuBe maximum vertical load 0.5 N (50 g) maximum torque on the axis 10 Ncm Compatibility with Electronics open loop controller ANC300: ANM200, ANM300 closed loop controller ANC350/FPS * measured by maximum deviation from linear fit on full range