attoPUBLICATIONS attoCATALOG-2017/18 | Page 298

PAGE 296 ANPx341 | open loop bearing-based, linear, horizontal stepper positioner 10 mK .. 373 K 0 .. 31 T 5E-11 mbar 2 kg 20 mm STIFFNESS + Optimized for high stability applications due to enhanced stiffness and high resonance frequencies. Size and Dimensions Coarse Positioning Mode footprint; height 40 x 45; 11.5 mm travel range (step mode) 20 mm max installation space 40 x 53.3; 11.5 mm typical minimum step size 100 nm @ 300 K, 20nm @ 4 K weight 76 g max. drive velocity (@ 300 K, no load) approx. 3 mm/s Materials (non-magnetic) Fine Positioning Mode positioner body titanium fine positioning range 0 .. 5 µm @ 300K, 0 .. 0.8 @ 4 K actuator PZT ceramics fine positioning resolution sub-nm bearings ceramics Accuracy of Movement (open loop) driving shaft ceramics repeatability of step sizes typically 5 % over full range connecting wires insulated twisted pair, copper forward / backward step asymmetry typically 5-10 % Options Load @ Ambient Conditions (mounting orientation: axis horizontal) environmental options /RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV maximum vertical load 20 N (2 kg) material option --- maximum dynamic force along the axis 2 N encoder options /RES, /NUM, /NUM+ high load option /HL/RT, /HL/(U)HV, HL/LT, /HL/LT/(U)HV Compatibility with Electronics open loop controller ANC300: ANM150, ANM300