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ANPx321 | closed loop
bearing-based, linear, horizontal stepper positioner with position encoders
ANPx321 | RES - positioner with resistive encoder
200 nm
10 mK .. 373 K
0 .. 31 T
Size and Dimensions
footprint; height 44 x 41.6; 11.5 mm
max installation space 44 x 49.1; 11.5 mm
weight 80 g
Accuracy of Positioning
encoder type resistive sensor
sensor resolution approx. 200 nm
repeatability approx. 1 .. 2 µm
Compatibility with Electronics
closed loop controller
ANC350/RES
for all other specifications see open loop model ANPx321
ANPx321 | NUM(+) - positioner with optoelectronic encoder
°C
1 nm
0 .. 55°C
0 .. 7 T
Size and Dimensions
footprint; height 44 x 41.6; 11.5 mm
max installation space 44 x 49.1; 11.5 mm
weight 81 g
Accuracy of Positioning
encoder type optoelectronic sensor
sensor resolution 1 nm
repeatability 50 nm
Compatibility with Electronics
closed loop controller
/NUM encoders are only compatible with /RT, /HV, and /UHV conditions
ANC350/NUM
for all other specifications see open loop model ANPx321
attoMOTION
Piezo-based Nano Drives