attoPUBLICATIONS attoCATALOG-2017/18 | Page 290

PAGE 288 ANPz101eXT12 | open loop linear, vertical stepper positioner with extended travel range 10 mK .. 373 K 0 .. 31 T 5E-11 mbar Size and Dimensions 12 mm 200 g Coarse Positioning Mode footprint; height 24 x 24; 32 mm travel range (step mode) 12 mm maximum size 24 x 24; 44 mm typical minimum step size 50 nm @ 300 K, 10nm @ 4 K weight 62 g max. drive velocity (@ 300 K, no load) approx. 3 mm/s Materials (non-magnetic) Fine Positioning Mode positioner body titanium fine positioning range 0 .. 5 µm @ 300K, 0 .. 0.8 @ 4 K actuator PZT ceramics fine positioning resolution sub-nm driving shaft ceramics Accuracy of Movement (open loop) connecting wires insulated twisted pair, copper repeatability of step sizes typically 5 % over full range forward / backward step asymmetry typically 5-10 % Options environmental options /RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV Load @ Ambient Conditions (mounting orientation: axis vertical) material option /CuBe maximum vertical load 2 N (200 g) encoder options /RES, /ULT, /NUM, /NUM+ maximum dynamic force along the axis 5 N Compatibility with Electronics open loop controller ANC300: ANM150, ANM300