attoPUBLICATIONS attoCATALOG-2017/18 | Page 287

PAGE 285 ANPz101 | closed loop linear, vertical stepper positioner with position encoders ANPz101 | RES - positioner with resistive encoder 200 nm 10 mK .. 373 K 0 .. 31 T Size and Dimensions footprint; height 24 x 24; 20 mm max installation space 24 x 24; 25 mm weight 38 g Accuracy of Positioning encoder type resistive sensor sensor resolution approx. 200 nm repeatability approx. 1 .. 2 µm Compatibility with Electronics closed loop controller ANC350/RES for all other specifications see open loop model ANPz101 ANPz101 | NUM(+) - positioner with optoelectronic encoder °C 1 nm 0 .. 55 °C 0 .. 7 T Size and Dimensions footprint; height 24 x 28; 20 mm max installation space 24 x 28; 25 mm weight 52.8 g Accuracy of Positioning encoder type optoelectronic sensor sensor resolution 1 nm repeatability 150 nm Compatibility with Electronics closed loop controller /NUM encoders are only compatible with /RT, /HV, and /UHV conditions ANC350/NUM for all other specifications see open loop model ANPz101 attoMOTION Piezo-based Nano Drives