attoPUBLICATIONS attoCATALOG-2017/18 | Page 284

PAGE 282 ANPx101 | open loop linear, horizontal stepper positioner 10 mK .. 373 K 0 .. 31 T 5E-11 mbar Size and Dimensions 5 mm 100 g Coarse Positioning Mode footprint; height 24 x 24; 11 mm travel range (step mode) 5 mm max installation space 24 x 29; 11 mm typical minimum step size 50 nm @ 300 K, 10nm @ 4 K weight 20 g max. drive velocity (@ 300 K, no load) approx. 3 mm/s Materials (non-magnetic) Fine Positioning Mode positioner body titanium fine positioning range 0.. 3.5 µm @ 300 K, 0.. 0.5 @ 4 K actuator PZT ceramics fine positioning resolution sub-nm driving shaft ceramics Accuracy of Movement (open loop) connecting wires insulated twisted pair, copper repeatability of step sizes typically 5 % over full range forward / backward step asymmetry typically 5-10 % Options environmental options /RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV Load @ Ambient Conditions (mounting orientation: axis horizontal) material option /CuBe maximum vertical load 1 N (100 g) encoder options /RES, /ULT, /NUM, /NUM+ maximum dynamic force along the axis 2 N Compatibility with Electronics open loop controller ANC300: ANM150, ANM300