attoPUBLICATIONS attoCATALOG-2017/18 | Page 279

PAGE 277 ANPx51 | closed loop linear, horizontal, and compact stepper positioner with position encoders ANPx51 | RES - positioner with resistive encoder 200 nm 10 mK .. 373 K 0 .. 31 T Size and Dimensions footprint; height 15 x 18; 9.2 mm max installation space 18 x 18; 9.2 mm weight 7.2 g Accuracy of Positioning encoder type resistive sensor sensor resolution approx. 200 nm repeatability approx. 1 .. 2 µm Compatibility with Electronics closed loop controller ANC350/RES for all other specifications see open loop model ANPx51 ANPx51 | NUM+ - positioner with optoelectronic encoder °C 1 nm 0 .. 55 °C 0 .. 7 T Size and Dimensions footprint; height 15 x 19; 9.2 mm max installation space 18 x 19; 9.2 mm weight 8.5 g Accuracy of Positioning encoder type optoelectronic sensor sensor resolution 1 nm repeatability 50 nm Compatibility with Electronics closed loop controller /NUM encoders are only compatible with /RT, /HV, and /UHV conditions ANC350/NUM for all other specifications see open loop model ANPx51 attoMOTION Piezo-based Nano Drives