attoPUBLICATIONS attoCATALOG-2017/18 | Page 272

Selected Applications
Premium Line - X-Ray measurements
focusing
mirror
source
sample
waveguide
f
SEM exit of waveguide
z 1
hologram of Siemensstar
detector
z 2
numerical reconstruction
2
5
160
3
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100
25 nm
40
40
100
pixel
160
1.8
4
1.6
2 3
1 2
1
1.4
1.2
1
2
3
x [ µ m]
4
1
Lensless Imaging with X-Ray Waveguides
A synchrotron generated X-Ray beam was coupled into an X-Ray waveguide lo-
cated in the focus of Kirkpatrick-Baez mirrors. The resulting filtered wave was
then used to illuminate a sample coherently, yielding a magnified hologram of
the sample recorded by a pixel detector. Several linear positioners, goniometers,
and rotators were applied for precision alignment of the waveguide with respect
to the sample, which in turn was mounted on a high-precision tomographic ro-
tation stage.
Reprinted with permission from S. Kalbfleisch et al., AIP. Conf. Proc., 1234, 433-436 (2010). © 2010, American Institute
of Physics.
Special Micro X-Ray Fluorescence Analysis (micro-XRF) Spectrometer
Confocal micro-XRF is a method to determine the spatial distribution of major,
minor and trace elements within a sample in three dimensions. The employed
polycapillary X-Ray optics need to be aligned precisely to get optimal results.
Very compact positioners had to be used inside the vacuum chamber for this pur-
pose. Long time stability of the alignment is also a major requisite. ANPxyz101
nanopositioners fulfill these
requirements very well.
The figure to the left shows a 3D sample measurement of a cross made from 10 μm
copper wire which is placed on an X-Ray screen and fixed
using adhesive tape [1].
[1] S. Smolek, C. Streli, N. Zoeger, and P. Wobrauschek, Rev. Sci. Instr. 81, 053707 (2010).
(The data was kindly provided by S. Smolek and C. Streli, Atominstitut of the TU Wien.)