Motion Tracking in Coordinate Measurement Machines
Sensorics Solutions
Messtaster
Auto Fit
Reset
↓ nm
400.000.000
300.000.000
200.000.000
up to 5 meters
100.000.000
0
-100.000.000
-200.000.000
-300.000.000
-400.000.000
- 50.000
-0.000
-40.000
-30.000
-20.000
-10.000
-0.000
← s
Sensor Head
20 μm
Target: column of a CMM
„Z
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OEM Interferometers for motion tracking in coordinate
measurement machines
Coordinate measurement machines (CMM) have highest requirements
towards precision. CMM determine geometrical dimensions of simple
and complex products and components for quality control (e.g., mea-
surements of manufacturing accuracy or tribological measurements).
Those applications require an accuracy in a sub-micrometer range,
while the calibration and the machine-integrated control need a higher
level of accuracy.
The laser interferometers of attocube are solutions providing highest
precision and large working distances at the same time – suiting the
challenging requirements of CMM. While the IDS3010 allows to measure
displacements of up to 5 meters, it simultaneously detects overshoots
in the nanometer range. Furthermore, the compact design of the
IDS3010 and the sensor heads fits machine-integrated applications.
Customers can choose:
• target velocity up to 2m/s
• direct beam or mirror deflection
• Workings distances of up to 5 meters with a constant precision in
nanometer range
• In situ measurements on the touching probe without Abbe er-
rors instead of mechanically transmitted position acquisition
(e.g glass-scales)
• Compact interferometer unit for machine-integration
TYPICAL APPLICATIONS
• Calibration of coordinate measurement machines
• In situ position acquisition of the touching probe
• Vibration analysis of the touching probe and components of CMMs
(e.g. identification of overshoots)
attoSENSORICS
Ultra Precision Sensors
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