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Vibration Analysis and Compensation
Sensoric Solutions
FFT Amplitude milling head
Auto Fit ↓ nm
3.000
2.500
2.000
1.500
1.000
500
0
0
20
40
60
80
100
120
Workingpiece
140
160
Auto Fit
180
Reset
200 ← Hz
↓ nm
809.672.160
809.672.140
809.672.120
809.672.100
809.672.080
809.672.060
809.672.040
-0.900
-0.800
-0.700
-0.600
-0.500
-0.400
-0.300
-0.200
-0.100
0.000
← s
OEM Interferometers for monitoring vibrations and
differential movements
Manufacturers of fast-running machine tools or manufacturers in semi-
conductor industries are facing diverse challenges in handling vibra-
tions and unintended movements of machine‘s components and of work
pieces. Limited spaces, ultra-high frequencies in different dimensions,
and short amplitudes hinder the integration of conventional sensors.
The laser interferometer IDS3010 is capable of measuring high frequen-
cy vibrations under limited space conditions. Using more than one mea-
surement axis enables the acquisition of relative velocities between
different components – the basis for active vibration compensation.
The manufacturing accuracy of a milling machine could be increased by
reducing the relative velocities of the milling head and the work piece
based on their vibrations.
Customers can choose:
• bandwidth up to 10 MHz – suits high-frequency vibrations of up to 5MHz
• linear analog output with a highpass filter for easy post-processing
• real-time Fast-Fourier-Transformation (FFT) in WAVE
• small sensor heads for machine integration and space-limited applica-
tions
TYPICAL APPLICATIONS
• Vibration monitoring of components in machine tools and semi
conductor industries
• Synchronous capturing of relative velocities between different
components for active vibration compensation
• Capturing movements of components for predictive maintenance
or condition monitoring