attoPUBLICATIONS attoCATALOG-2017/18 | Page 233

Selected Applications FPS Sensors Measuring Water Surface Displacements To measure the displacements of a cup’s water surface compared to the displacements of the table the cup is positioned on, two focused sensor heads were used: one of them focused on the water surface, the other focused on a mirror fixed to the table, while the table was hit by a hammer. The water surface oscillates with a maximum deflection of approximately ± 20 μm and the table oscillates with a maximum amplitude of around ± 0.7µm. The zoom highlights that the two measurement arms show similar behaviors in the high frequency range for the first milliseconds after the excitation. (attocube application note SEN16, 2017) The blue curve shows the water surface and sensor head movements and the red curve represents the displacements measured on the side of the mirror after hitting the optical table with a hammer. High Resolution X-Ray Microscopy When developing an X-Ray microscope capable of nm resolution, careful design is a must. Thermal and mechanical stability of the components and assemblies has to be followed throughout the process. The FPS shows superior performance regarding its outstanding stability and its capability of measuring sub-nm displacements. The senor has a better than 1.25 nm stability over 40 hours, and a better then 300 pm resolution at 100 Hz bandwidth in a controlled environment. The FPS is therefore the ideal supplement for the mechanical control of all components used in the described X-Ray microscope setup achieving a resolution in the order of 40 nm, while the stability is below 45 nm over the entire time needed for data collection. (attocube application note SEN09, 2014) 300 pm, 500 pm, and 1000 pm steps performed by the scanner in the z-direction and recorded by the fiber-optic interferometer. Interferometer head-reflector separation was set to 25 mm. attoSENSORICS Ultra Precision Sensors PAGE 231