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CUSTOMER FEEDBACK CUSTOMER FEEDBACK
Dr. Stefan Kubsky Nicolas Stübe, Dr. Alke Meents
An intense and ongoing scientific exchange with the attocube-development
team permitted us to obtain new functionalities and highest precision. Our
system, being inherently non-standard, profits greatly from the compactness
and modularity of the sensor heads. We rapidly managed to file a patent
application implying interferometric metrology. Due to the fast adjustment and precise sub-nanometer resolution of the sensor, we are able to easily identify
trajectories and eigen frequencies for the optimization of flexure based components. The combination of
the digital interfaces with our motion control system allows most accurate closed-loop control for scanning
applications. With the closed-loop integration of the IDS3010 in our X-Ray microscope by the end of this year,
we feel confident to get the first 3-D tomographic pictures of biological samples with a resolution of 20 nm
within the beginning of 2016.
(Synchrotron Soleil St. Aubin, France)
(DESY/suna-precision GmbH, Hamburg, Germany)
Sensor
Fields of Applications - Examples
number of sensor axes 3
working distance 0…5000 mm (depending on sensor head)
sensor resolution 1 pm
sensor repeatability 2 nm 1)
max. target velocity 2 m/s
measurement bandwidth 10 MHz
signal stability (WD: 77 mm) 0.110 nm (2σ)
Modes of Operation
Coordinate
Measurement
Real-Time
Vibration Detection
measurement modes displacement
remote operation integrated webserver
output signal: electronics sin/cos, linear analog, AquadB, HSSL,
field bus systems on request
output signal: displacement measurement laser light (IR)
output signal: alignment laser laser light (VIS)
sensor alignment via integrated webserver or DLLS (C, C#)
sensor initialization via integrated webserver or DLLS (C, C#)
Interfaces
Semiconductor
Technology
Synchrotron
Applications
analog interfaces sin/cos, linear analog (real-time)
digital interfaces AquadB, HSSL (real-time)
field bus interfaces (optional) Biss-C
field bus interfaces (on request) EtherCAT, CANopen, Profinet, Profinet RT
Controller Hardware
chassis 55 x 52 x 195 mm³
weight 730 g
power supply 12 V DC
power consumption 8 W
Measurement Laser
Drive
Technology
Machine Tools
Calibration
laser source DFB laser (class 1)
laser power 400 µW
laser wavelength 1530 nm
wavelength stability 50 ppb
1) at 10 mm working distance in vacuum conditions, +/-1ppm in ambient conditions with ECU.
attoSENSORICS
Ultra Precision Sensors