attoPUBLICATIONS attoCATALOG-2017/18 | Page 213

PAGE 211 CUSTOMER FEEDBACK CUSTOMER FEEDBACK Dr. Stefan Kubsky Nicolas Stübe, Dr. Alke Meents An intense and ongoing scientific exchange with the attocube-development team permitted us to obtain new functionalities and highest precision. Our system, being inherently non-standard, profits greatly from the compactness and modularity of the sensor heads. We rapidly managed to file a patent application implying interferometric metrology. Due to the fast adjustment and precise sub-nanometer resolution of the sensor, we are able to easily identify trajectories and eigen frequencies for the optimization of flexure based components. The combination of the digital interfaces with our motion control system allows most accurate closed-loop control for scanning applications. With the closed-loop integration of the IDS3010 in our X-Ray microscope by the end of this year, we feel confident to get the first 3-D tomographic pictures of biological samples with a resolution of 20 nm within the beginning of 2016. (Synchrotron Soleil St. Aubin, France) (DESY/suna-precision GmbH, Hamburg, Germany) Sensor Fields of Applications - Examples number of sensor axes 3 working distance 0…5000 mm (depending on sensor head) sensor resolution 1 pm sensor repeatability 2 nm 1) max. target velocity 2 m/s measurement bandwidth 10 MHz signal stability (WD: 77 mm) 0.110 nm (2σ) Modes of Operation Coordinate Measurement Real-Time Vibration Detection measurement modes displacement remote operation integrated webserver output signal: electronics sin/cos, linear analog, AquadB, HSSL, field bus systems on request output signal: displacement measurement laser light (IR) output signal: alignment laser laser light (VIS) sensor alignment via integrated webserver or DLLS (C, C#) sensor initialization via integrated webserver or DLLS (C, C#) Interfaces Semiconductor Technology Synchrotron Applications analog interfaces sin/cos, linear analog (real-time) digital interfaces AquadB, HSSL (real-time) field bus interfaces (optional) Biss-C field bus interfaces (on request) EtherCAT, CANopen, Profinet, Profinet RT Controller Hardware chassis 55 x 52 x 195 mm³ weight 730 g power supply 12 V DC power consumption 8 W Measurement Laser Drive Technology Machine Tools Calibration laser source DFB laser (class 1) laser power 400 µW laser wavelength 1530 nm wavelength stability 50 ppb 1) at 10 mm working distance in vacuum conditions, +/-1ppm in ambient conditions with ECU. attoSENSORICS Ultra Precision Sensors