attoPUBLICATIONS attoCATALOG-2017/18

PAGE 202 IDS/FPS Sensor Heads optimized for a broad range of applications 2 Type of Motion • High-frequency Vibration • Low-frequency Vibration • Rotation • Overshoots • Linear Motion 2 1 3 Geometrical Shape of Target • Flat • Spherical • Circular 4 1 3 Material/ Surface quality • Mirror & Retroreflector • Steel (polished) • Silicon/Wafer • Glass