Microscopy Solutions
PAGE 190
Nanotools
for Scanning Electron Microscopes sophisticated multi-degree-of-freedom solutions for SEM
attoAFM I for SEM
With a decade of experience in scanning probe microscopy , attocube has succeeded in equipping the attoAFM I with all the virtues important for successful operation inside a scanning electron microscope ( SEM ). Thanks to its extremely rugged design and miniaturized size , the force microscope can be fully integrated into almost any SEM currently available on the market . Its 45 ° tilted design allows full visual access to both AFM tip and sample using the SEM . Being compatible with virtually all commercially available cantilevers , the attoAFM I allows the user not only to image surface topographies , but also to visualize e . g . surface magnetic or electrostatic properties . Furthermore , by varying the stiffness of the cantilever , nanoindentation and tensile strength experiments can be easily conducted .
attoAFM III for SEM
Similar to the attoAFM I , the attoAFM III is an offshoot of attocube ‘ s successful low temperature atomic force microscope series . In contrast to its cantilever-based counterpart , the attoAFM III uses a tuning fork sensor for ultra-sensitive topographic measurements . Due to the miniature size of the tuning fork sensor , the attoAFM III is even more compact than the attoAFM I , allowing simple integration into virtually any electron microscope currently available on the market . The zero-tilt design of the attoAFM III allows full visual access onto both sample and tip , while retaining the same coordinate systems for both SEM and AFM , making sample positioning and coarse approach a delight . The simple but powerful design of the attoAFM III has proven very successful in various applications , such as for the in-situ investigation of exposed , but undeveloped e-beam resist . attoPROBESTATION for SEM
The attoProbeStation is based on attocube ’ s state-of-the-art , modular nanopositioning devices which can be equipped with optical or resistive encoders for closed loop operation ( optional ). The attoProbeStation consists of four probes which can be positioned independently of each other , allowing probe movement in Cartesian coordinates with sub-nm resolution in all directions . Each probe is electrically contacted by highest quality coaxial cables , ensuring low current , high signal-to-noise electrical measurements . In addition to the probe tips ’ degrees of freedom , the attoPROBESTATION can also be equipped with translational and rotational positioners for the sample , hence enabling sophisticated device testing schemes in-situ .