ECSxy5050 - ECSxy5050/NUM | open loop & closed loop
nanoprecise stepper positioner for two-dimensional, horizontal motion
°C
DEVELOPMENT
25 x 25 mm²
15 kg
0 .. 100 °C
PRODUCTS
€
SOFT/HARDWARE
€
MIO. €
R&D ENGINEER
REVENUE
MIC
available in our webshop
shop.attocube.com
DEVELOPMENT
attoshop
€
MIO. €
Size and Dimensions
SOFT/HARDWARE
€
R&D ENGINEER
REVENUE
Coarse Positioning Mode
footprint; height 50 x 50; 16.4 mm travel range (step mode) 25 x 25 mm²
max installation space 75 x 75; 16.4 mm typical minimum step size 50 nm
weight (aluminum) 111 g max. drive velocity (@ 300 K, no load) 4.5 mm/s
Materials
Fine Positioning Mode
positioner body aluminum fine positioning range 0 .. 1.6 µm
actuator PZT ceramics fine positioning resolution sub-nm
bearings stainless steel Accuracy of Movement (open loop) connecting wires insulated twisted pair, copper repeatability of step sizes typically 5 % over full range
forward / backward step asymmetry typically 5-10 %
Options
environmental options /RT Accuracy of Positioning (closed loop) material option /Al position resolution 1 nm
encoder options /NUM repeatability 50 nm
Compatibility with Electronics
open / closed loop controller
Load @ Ambient Conditions (mounting orientation: vertical)
ECC100
maximum vertical load 150 N (15 kg)
maximum dynamic force along the axis 2 N
attoMOTION
Piezo-based Nano Drives
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