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ECSx3030 - ECSx3030/NUM | open loop & closed loop
nanoprecise stepper positioner for linear, horizontal motion
°C
DEVELOPMENT
5E-11 mbar
20 mm
9 kg
0 .. 100 °C
PRODUCTS
€
SOFT/HARDWARE
€
MIO. €
R&D ENGINEER
REVENUE
MIC
available in our webshop
shop.attocube.com
DEVELOPMENT
€
MIO. €
Size and Dimensions
attoshop
SOFT/HARDWARE
€
REVENUE
R&D ENGINEER
Coarse Positioning Mode
footprint; height 30 x 30; 9.5 mm travel range (step mode) 20 mm
max installation space 30 x 51.6; 9.5 mm typical minimum step size 50 nm
weight (aluminum/stainless steel) 29/51 g max. drive velocity (@ 300 K, no load) 4.5 mm/s
Materials
Fine Positioning Mode
positioner body aluminum / stainless steel fine positioning range 0 .. 1.6 μm
actuator PZT ceramics fine positioning resolution sub-nm
bearings stainless steel Accuracy of Movement (open loop) connecting wires insulated twisted pair, copper repeatability of step sizes typically 5 % over full range
forward / backward step asymmetry typically 5-10 %
Options
environmental options /RT, /HV, /UHV Accuracy of Positioning (closed loop) material option /Al, /StSt position resolution 1 nm
encoder options /NUM repeatability 50 nm
Compatibility with Electronics
open / closed loop controller
Load @ Ambient Conditions (mounting orientation: axis horizontal)
ECC100
maximum vertical load 90 N (9 kg)
maximum dynamic force along the axis 1 N