attoPUBLICATIONS attoCATALOG-2017/18 | Page 294

Linear Positioners
PAGE 292

ANPx312 | open loop bearing-based , linear , horizontal stepper positioner

10 mK .. 373 K 0 .. 31 T 5E-11 mbar 6 mm 2 kg
STIFFNESS
++
Optimized for ultra-high stability applications ( such as STM or optical cavity experiments ) , especially with high loads . Stiffness and resonance frequencies are still further increased .
Size and Dimensions
footprint ; height
30 x 30 ; 12 mm
max installation space
36 x 30 ; 12 mm
weight
42 g
Materials ( non-magnetic )
positioner body
titanium
actuator
PZT ceramics
bearings
ceramics
driving shaft
ceramics
connecting wires
insulated twisted pair , copper
Options
environmental options
/ RT , / HV , / UHV , / LT , / LT / HV , / LT / UHV
material option
---
encoder options
/ RES
high load option
---
Compatibility with Electronics
open loop controller
ANC300 : ANM150 , ANM300
Coarse Positioning Mode
travel range ( step mode )
6 mm
typical minimum step size
100 nm @ 300 K , 20nm @ 4 K
max . drive velocity (@ 300 K , no load )
approx . 3 mm / s
Fine Positioning Mode
fine positioning range
0 .. 5 ยต m @ 300K , 0 .. 0.8 @ 4 K
fine positioning resolution
sub-nm
Accuracy of Movement ( open loop )
repeatability of step sizes
typically 5 % over full range
forward / backward step asymmetry
typically 5-10 %
Load @ Ambient Conditions ( mounting orientation : axis horizontal )
maximum vertical load
20 N ( 2 kg )
maximum dynamic force along the axis
2 N