Size and Dimensions | |
footprint ; height |
30 x 30 ; 12 mm |
max installation space |
36 x 30 ; 12 mm |
weight |
42 g |
Materials ( non-magnetic ) | |
positioner body |
titanium |
actuator |
PZT ceramics |
bearings |
ceramics |
driving shaft |
ceramics |
connecting wires |
insulated twisted pair , copper |
Options | |
environmental options |
/ RT , / HV , / UHV , / LT , / LT / HV , / LT / UHV |
material option |
--- |
encoder options |
/ RES |
high load option |
--- |
Compatibility with Electronics | |
open loop controller |
ANC300 : ANM150 , ANM300 |
Coarse Positioning Mode | |
travel range ( step mode ) |
6 mm |
typical minimum step size |
100 nm @ 300 K , 20nm @ 4 K |
max . drive velocity (@ 300 K , no load ) |
approx . 3 mm / s |
Fine Positioning Mode | |
fine positioning range |
0 .. 5 ยต m @ 300K , 0 .. 0.8 @ 4 K |
fine positioning resolution |
sub-nm |
Accuracy of Movement ( open loop ) | |
repeatability of step sizes |
typically 5 % over full range |
forward / backward step asymmetry |
typically 5-10 % |
Load @ Ambient Conditions ( mounting orientation : axis horizontal ) | |
maximum vertical load |
20 N ( 2 kg ) |
maximum dynamic force along the axis |
2 N |