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ANPx311 | open loop
bearing-based, linear, horizontal stepper positioner
10 mK .. 373 K
0 .. 31 T
5E-11 mbar
6 mm
2 kg
STIFFNESS
+
Optimized for high stability
applications due to enhanced
stiffness and high resonance
frequencies.
Size and Dimensions
Coarse Positioning Mode
footprint; height 30 x 30; 10 mm travel range (step mode) 6 mm
max installation space 36 x 30; 10 mm typical minimum step size 100 nm @ 300 K, 20nm @ 4 K
weight 30 g max. drive velocity (@ 300 K, no load) approx. 3 mm/s
Materials (non-magnetic)
Fine Positioning Mode
positioner body titanium fine positioning range 0 .. 5 µm @ 300K, 0 .. 0.8 @ 4 K
actuator PZT ceramics fine positioning resolution sub-nm
bearings ceramics Accuracy of Movement (open loop) driving shaft ceramics repeatability of step sizes typically 5 % over full range
connecting wires insulated twisted pair, copper forward / backward step asymmetry typically 5-10 %
Options
Load @ Ambient Conditions (mounting orientation: axis horizontal)
environmental options /RT, /HV, /UHV, /LT, /LT/HV, /LT/UHV maximum vertical load 20 N (2 kg)
material option --- maximum dynamic force along the axis 2 N
encoder options /RES high load option /HL/RT, /HL/(U)HV, HL/LT, HL/LT/(U)HV
Compatibility with Electronics
open loop controller
ANC300: ANM150, ANM300