attoPUBLICATIONS attoCATALOG-2017/18 | Page 283

ANPz51eXT | closed loop linear , vertical , and compact stepper positioner with extended travel range and position encoder

PAGE 281
Linear Positioners
ANPz51eXT | RES - positioner with resistive encoder
200 nm 10 mK .. 373 K 0 .. 31 T
Size and Dimensions footprint ; height max installation space weight Accuracy of Positioning encoder type sensor resolution repeatability Compatibility with Electronics closed loop controller
15 x 18 ; 17 mm 15 x 18 ; 23 mm 15 g
resistive sensor approx . 200 nm approx . 1 .. 2 ยต m
ANC350 / RES
for all other specifications see open loop model ANPz51eXT
attoMOTION
Piezo-based Nano Drives