attoPUBLICATIONS attoCATALOG-2017/18 | Page 281

PAGE 279 ANPz51 | closed loop linear, vertical, and compact stepper positioners with position encoders ANPz51 | RES - positioner with resistive encoder 200 nm 10 mK .. 373 K 0 .. 31 T Size and Dimensions footprint; height 18 x 15; 13.5 mm max installation space 18 x 15; 16 mm weight 13 g Accuracy of Positioning encoder type resistive sensor sensor resolution approx. 200 nm repeatability approx. 1 .. 2 µm Compatibility with Electronics closed loop controller ANC350/RES ANPz51 | NUM+ - positioner with optoelectronic encoder °C 1 nm 0 .. 55 °C 0 .. 7 T Size and Dimensions footprint; height 15 x 19; 13.5 mm max installation space 15 x 19; 16 mm weight 13.9 g Accuracy of Positioning encoder type optoelectronic sensor sensor resolution 1 nm repeatability 50 nm Compatibility with Electronics closed loop controller /NUM encoders are only compatible with /RT, /HV, and /UHV conditions ANC350/NUM for all other specifications see open loop model ANPz51 attoMOTION Piezo-based Nano Drives