PAGE 273
ANPz101
ANPz102 ANPz101eXT12 /RES, /ULT /RES, /ULT, /NUM(+) /RES /RES /HL --- --- /HL --- /HL /HL
24 x 24; 20 mm 24 x 24; 27 mm 24 x 24; 32 mm 30 x 30; 10 mm 30 x 30; 12 mm 40 x 41.6; 11.5 mm 40 x 45; 11.5 mm
/RT,
/RES, /ULT, /NUM(+)
ANPx311
/HV,
/UHV,
/LT,
ANPx312
/LT/HV,
ANPx321
ANPx341
/LT/UHV
/RES, /NUM(+)
/RES, /NUM(+)
5 mm 5 mm 12 mm 6 mm 6 mm 15 mm 20 mm
3 mm/s 3 mm/s 3 mm/s 3 mm/s 3 mm/s 3 mm/s 3 mm/s
2 N 2 N 2 N 20 N 20 N 20 N 20 N
5 N 5 N 5 N 2 N 2 N 2 N 2 N
200 nm 200 nm 200 nm 200 nm 200 nm 200 nm 200 nm
1..2 µm 1..2 µm 1..2 µm 1..2 µm 1..2 µm 1..2 µm 1..2 µm
1 nm --- 1 nm --- --- 1 nm 1 nm
50 nm --- 50 nm --- --- 50 nm 50 nm
Working conditions and specifications
temperature
range
vacuum
range
magnetic
field range
travel
range
load
closed loop
resolution
attoMOTION
Piezo-based Nano Drives