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Glossary
scanners and stepping positioners
All attocube stepping positioners and scanners are driven via
piezoceramics made from lead zirconite titanate (PZT) for voltages
<150V. The PZT for cryogenic scanners and steppers is optimized for
maximal performance under these conditions. The stepping positioners and scanners of each product line can be
combined with one another to fit even the most sophisticated multi-
axis applications. See page 260 for further information.
Scanners Stepping positioners:
attocube’s scanners are available for extremely smooth motion as
part of the Premium Line. They feature up to three linear axes. The piezosteppers of attocube can perform linear or goniometric
movements as well as 360° rotations.
• travel range up to 125 µm
• driven via DC voltage (mainly unipolar)
• continuous motion
• motion almost linear to voltage (limited by piezo
hysteresis and piezo creep)
• movement of piezo amplified via solid state flexures • travel range up to 50 mm (linear), 10° (goniometric)
360° endless (rotational)
• slip stick principle (see next page),driven via sawtooth voltage
• minimum step size: down to 10 nm
• speed up to several mm/s
• can be used in fine positioning (=scan) mode by applying a
DC voltage to obtain sub-step-size resolution (with selected
controllers, i.e. ANC350, ANM300, ECC100/Pro)
Premium Line
Nano Drives for Research
Premium Line
Nano Drives for Research
Industrial Line
Nano Drives for Industry
ANP ECS
ANG ECG
ANR ECR
ANS
To acquire microscope images we recommend using (stepping) positioners for course positioning and dedicated scanners for the image acquisition.
It is not recommended to use steppers for image acquisition as open loop positioners show non-linearities while closed loop positioners are slowed
down by the settling time required to reach a position (see also next page).