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Ultra Precise In-Line Travel Property Control
Sensorics Solutions
OEM Interferometers for real-time stage guiding accuracy Customers can choose:
In many industrial processes, motion and accuracy of motion are of
utmost importance. This is true for machining processes (e.g. ultra-
precision machining), wafer processing and inspection, metrology
measurements, and many other applications. • sensor head diameter from 1.2 mm up to 15.5.mm
• distance sensor head to target from 0 mm to > 5 meters
• target velocity up to 2 m/s
• direct beam or mirror deflection
• customized housing
For this purpose, attocube has designed a three-axis miniature laser
interferometer, which provides ultra precise real-time measurement of
linear target motion as well as analysis of parasitic pitch and yaw mo-
tions. If embedded in a closed loop circuitry, motion in three degrees of
freedom can be controlled down to the nanometer scale.
TYPICAL APPLICATIONS
• Calibration of machine tools, linear motors, spindles or Coordi-
nate Measurement Machines
• In-line displacement, pitch, and yaw measurement/control
(embedded in closed-loop circuitry)
• Multiple degree of freedom measurements in quality control for
the detection and limitation of errors in production
• Tilt control between die and substrate in Flip-Chip-Bonding
Systems