attoPUBLICATIONS attoCATALOG-2017/18 | Page 231

Selected Measurements real-time vibrometry measurements Vibrometry measurements as performed on a piezoelectric ceramic, measured with a FPS sensor. Stunningly, vibration amplitudes of few picometers can be detected even at low frequency. Ultra-wide frequency range vibrometry The FPS sensor is not only a very capable real-time displacement sensor but it also serves the user as a powerful vibrometer. With its built-in fast-Fourier algorithm (FFT), the FPS series directly detects the distri- bution of vibrational modes/amplitudes in frequency space. Frequency and phase information of resonance peaks can be live-viewed on the PC-based FPS application software. The data above demonstrate the suitability of the FPS sensor for this type of application. In this specific case, the low-frequency noise behaviour of the FPS sensor was tested by exciting and measuring the vibration spectrum of a ceramic piezo at low frequency and ultra-low amplitude. As can be seen from the data, the noise floor of the measurement is at 10 -6 microns equivalent to 1 picometer. Stunningly, this noise floor extends to very low frequency, enabling picometer resolution at frequencies as low as 2 Hz. Data are recorded at 100 Hz bandwidth. (attocube applications labs, 2014) attoSENSORICS Ultra Precision Sensors PAGE 229