Selected Applications
IDS Sensors
Profilometry on Micron-Sized Objects
Ultra-precise and contactless surface analyses are of major interest in
order to guarantee the quality of the material in many research and industrial
applications. The large acceptance angle is one of the main strong benefits
of attocube’s Industrial Displacement Sensor (IDS). Due to its proprietary
patented techniques, the system allows for measurements on surfaces
with more than 10° inclination with respect to the measurement direction.
The actual measurement shows nanometer precise 3D profilometry data of
micron-sized metal cylinders. Several deformations can be seen: In the
center position the object profile clearly shows a dent on its surface with a
depth of around 400 nm. In addition the diameter contour in the front part
near x = 0 has a plateau over a length of approximately 10 μm.
(attocube application note SEN14, 2016)
Ultra Precise Contactless Detection of Bearing Errors
Error motions of rotating objects are far-reaching issues in high precision
mechanical engineering. In case of a high speed spindle, even sub-nm deviations
from a perfect rotation can create undesired vibrations or error movements.
Monitoring error motion with sub-nm resolution is therefore of prime necessity
from state of the art mechanical engineering to nanotomography research.
Since vibrations and error motions limit the maximum accuracy of high preci-
sion machine tools, the IDS is the first step to increase manufacturing accuracy
by acquiring error motions of different dimensions in a sub-nm resolution.
The IDS can be used for calibrating spindles in machine tools or for detecting
bearing errors of small shafts. The small sensor heads enable inline measurements
of rotating shafts for tracking error motions.
(attocube application note SEN08, 2013)
attoSENSORICS
Ultra Precision Sensors
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