PAGE 208
IDS Sensors
displacement sensing for industry & synchrotron
Some of the most important tasks in industrial metrology applications
are contactless measurements of distances and displacements, the
detection of vibration amplitudes of machine components and tools,
and the ultra-precise survey of rotationally symmetric parts. Fields
of application are extremely versatile and range from ultra-precision
machining to semiconductor technology.
Accurate
Requirements on accuracy, flexibility, and interconnectivity are
constantly increasing and ask for ever more sophisticated solutions.
These solutions are supposed to combine highest precision, speed, and
reliability - while providing remote access and software maintenance from
virtually anywhere on the planet. attocube’s IDS3010 sensor has been
specifically designed for challenging OEM and synchrotron applications
and fulfills future requirements on precision already today.
Accurate Measurement software WAVE
The built-in DFB laser of the IDS is locked to a molecular absorp-
tion frequency reference, making the detected displacement
traceable to international length standards. All measurements
are therefore truly accurate in a metrological sense. (see page 199) The optional software package WAVE provides a fast and easy
data visualizing and post-processing. Multiple functions like
zooming, pausing, or a live Fast-Fourier-Transformation enable a
live analysis of measurement data.
Ultra fast Multi axis operation up to 5m
All IDS Sensors measure the position of the target with a band-
width of 10 MHz and a resolution of 1 pm. At the same time, the
sensor is compatible with displacement velocities of up to 2 m/s.
The IDS offers three measurement axes which operate simultane-
Z
Y ously, enabling tracking target displacements in three degrees of
X freedom over dynamic travel ranges of up to 5 m.
Multi Axis
Machine integrable Environmental compensation
Due to its compact size (55mm x 52mm x 195mm) and its pas-
sively cooled housing, IDS Sensors can be directly integrated
into milling machines, coordinate measurement machines, and
semicon equipment. Adapter plates enable the integration into
electric control cabinets. IDS sensors can be equipped with an optional environmental
compensation unit (ECU). The ECU enables the operation of IDS
sensors at ambient conditions while maintaining an accuracy
guaranteed ± 1ppm (up to 5 m) and expected ± 0 ppm (up to
4.2 m) under a wide range of pressure, temperature, and
humidity values.
bar
Industrial interfaces VIS alignment laser
IDS sensors are compatible with a multitude of interfaces.
As standard interfacing, IDS Sensors provide real-time digital
(HSSL, AquadB) and analog (sin/cos, linear) position data. Alter-
natively, the IDS can optionally be upgraded with BiSS-C.
In addition, IDS devices interface with field busses such as
CANopen, Profibus, Profibus RT, and EtherCAT (on request). All IDS sensors are equipped with an integrated visible alignment
laser (650 nm). The alignment laser can be software enabled
during mechanical installation of the sensor, greatly reducing
setup duration. An alignment software tool simplifies the
process further.