attoPUBLICATIONS attoCATALOG-2017/18 | Page 156

PAGE 154 Specifications Cryogenic Photonic Probe Station General Specifications type of instrument combined side injection into planar waveguide structures and perpendicular confocal optics on top of the sample, perpendicular injection is possible sensor head specifics two independent lensed fiber probes with 3 individual degrees of freedom, low temperature compatible apochromatic objective and external confocal optics head Confocal Unit configuration compact and modular design, two or more optical channels standard configuration: 1 excitation channel,1 detection channel quick-exchange of optical components beamsplitters, filter mounts for up to 4 filters/ polarizers (1" diameter), optional piezoelectric rotator with filter mount LT- compatible objective LT-APO/VIS, LT-APO/VISIR, LT-APO/NIR (see accessory section for more information) inspection unit sample imaging with large field of view: approx. 100 μm long-term stability lateral drift of confocal spot typically <2 nm/h Sample Positioning total travel range Sample: 6 mm x 6 mm (closed loop) fiber probes: 3 x 3 x 2.5 mm³ (closed loop) sensor resolution approx. 200 nm, sensor repeatibility approx. 1-2 μm step size 0.05..3 μm @ 300 K, 10..500 nm @ 4 K sample holder carefully thermalized, quick exchange mechanism, including calibrated temperature sensor and heater temperature range 4..320K operating pressure 1E-6 mbar .. 1 bar Suitable Cooling Systems compatible cryostats attoDRY800 (flow cryostats on request) laser LDM600 laser/detector module (for detailed specifications please see attoCONTROL section)